Surface Optimization

Engineering Solutions
 


 



 

 SURFACE OPTIMIZATION
 
IMPROVE MEMS RELIABILITY ! 
 
Prevent in-use stiction of mobile structures by reducing surface energy
 
Advantages and Benefits
  • Reduction of surface adhesion energy - up to 400 x less for oxidized silicon
  • No added lithography step
  • Compliant wih vacuum processes and packaging
  • Resistant to solvent and temperature 
 
Applications
Accelerometers   -   Resonators   -   RF Switch   -   Floating Antennas   -  ...
 
Approach
  • Failure Analysis
  • Monolayer Solution evaluation
  • Process integration and transfer to production line